---
title: "Compatibility Assessment of CVD growth of Carbon nanofibers on bulkCMOS devices"
canonical_url: "https://www.smoltek.com/compatibility-assessment-of-cvd-growth-of-carbon-nanofibers-on-bulkcmos-devices/979/"
date: 2008-07-18
author: "Thomas Barregren"
featured_image: "https://www.smoltek.com/wp-content/uploads/2021/12/7dpwnjeeevs-jpg.webp"
categories:
  - name: "Research"
    url: "https://www.smoltek.com/category/research.md"
---

# Compatibility Assessment of CVD growth of Carbon nanofibers on bulkCMOS devices

We com­pare the lev­el of dete­ri­o­ra­tion in the basic func­tion­al­i­ty of indi­vid­ual tran­sis­tors on ASIC chips fab­ri­cat­ed in stan­dard 130 nm bulk CMOS tech­nol­o­gy when sub­ject­ed to three dis­parate CVD tech­niques with rel­a­tive­ly low pro­cess­ing tem­per­a­ture to grow car­bon nanos­truc­tures. We report that the growth tech­nique with the low­est tem­per­a­ture has the least impact on the tran­sis­tor behavior.

[Read more](https://pubs.acs.org/doi/abs/10.1021/nl801397j)