Multilayer Cap

The invention: A MIM energy storage device comprising a bottom electrode; a plurality of conductive vertical nanostructures; conformally coating a bottom conductive control layer of each of the plurality of conductive vertical nanostructures; and a layered stack of alternating conductive control layers and electrode layers conformally coating the bottom conductive control layer, the layered stack including at least a first odd-numbered electrode layer at the bottom of the layered stack, a first odd-numbered conductive control layer directly on the first odd-numbered electrode layer, and a first even-numbered electrode layer directly on the first odd-numbered conductive control layer. Each even-numbered electrode layer in the layered stack is conductively connected to the bottom electrode; and each odd-numbered electrode layer in the layered stack is conductively connected to any other odd-numbered electrode layer in the layered stack.

Granted patents relating to the innovation