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Research paper published in the proceedings of 2020 IEEE 70th Electronic Components and Technology Conference (ECTC), 2020, pp. 2139-2144.
M Bylund, R Andersson, A M Saleem, E Passalacqua, S Krause, V Marknäs, S Kabir, V Desmaris • August 5, 2020
In this paper, we present carÂbon nanofiber (CNF)-based capacÂiÂtors in a MIM conÂfigÂuÂraÂtion, a CNF-MIM, with a small footÂprint, low proÂfile height, and high capacÂiÂtance denÂsiÂty that can be used both as inteÂgratÂed and as disÂcrete comÂpoÂnent. Being proÂduced in a fulÂly CMOS comÂpatÂiÂble process it is likeÂly to play a major role as furÂther miniaÂturÂizaÂtion of future elecÂtronÂics moves on. The devices were charÂacÂterÂized from 25 °C to 150 °C and from 0 V to 5 V. It was demonÂstratÂed that a CNF-MIM with a total CNF height of 6 μm achieved a capacÂiÂtance denÂsiÂty of about 400 nF/​mm2. Also shown was an ESR of about 45 mΩ. It was found that the capacÂiÂtance increased slightÂly with temÂperÂaÂture by 0.03−0.06 %/​K and that the capacÂiÂtance was staÂble for biasÂing voltÂage with an increase between 0.5−4 %/​V. Hence, it meets well with the X7R specÂiÂfiÂcaÂtions. This behavÂior makes it a good comÂpetiÂtor comÂpared to MLCCs whose capacÂiÂtance decreasÂes with temÂperÂaÂture and applied voltÂage and the CNF-MIM does this at the fracÂtion of the device thickÂness of the MLCC.
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