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Research paper published in the proceedings at the 3rd PCNS 7-10th September 2021, Milano, Italy as paper No.5.3. and voted by attendees as: BEST PAPER AWARD.
M Bylund, R Andersson, A M Saleem, E Passalacqua, V Marknäs, V Desmaris • October 2, 2021
This paper will present a novÂel techÂnolÂoÂgy (CNF-MIM) comÂbinÂing CarÂbon Nanofiber (CNF) mateÂriÂals and MIM (metal-insulator-metal)-like techÂnolÂoÂgy, enabling capacÂiÂtors with total thickÂness lowÂer than 40 µm suitÂable for use in future miniaÂturÂized electronics.
The ultra-thin and disÂcrete CNF-MIM capacÂiÂtors have been manÂuÂfacÂtured and charÂacÂterÂized on sevÂerÂal subÂstrates, showÂing excelÂlent elecÂtriÂcal propÂerÂties such as high capacÂiÂtance denÂsiÂty of sevÂerÂal hunÂdreds of nF/​mm2, ESR (equivÂaÂlent series resisÂtance) in the mOhm range, low ESL (equivÂaÂlent series inducÂtance) on the order of 10 pH thus being promisÂing for a mulÂtiÂtude of appliÂcaÂtions withÂin the semiÂconÂducÂtor indusÂtry. To assess the long-term duraÂbilÂiÂty, CNF-MIM capacÂiÂtors have also been subÂjectÂed to proÂlonged expoÂsure to high temÂperÂaÂture and conÂstant voltÂage bias enviÂronÂments folÂlowÂing a HTS (high temÂperÂaÂture storÂage) and BTS (biased temÂperÂaÂture stress) stanÂdard. The CNF-MIM capacÂiÂtor show iniÂtial robustÂness against degraÂdaÂtion in these scenarios.
The paper was preÂsentÂed by Maria Bylund, Smoltek AB, GothenÂburg, SweÂden at the 3rd PCNS 7–10th SepÂtemÂber 2021, Milano, Italy as paper No.5.3. and votÂed by attenÂdees as: BEST PAPER AWARD.
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