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Nanostructure E‑beam writer
The Nanostructure E-beam writer family is covering a method for the manufacture of an integrated circuit comprising nanostructures.
The invention: A nanostructure-based electron beam writer. The innovation is an electron beam writer that enables the creation of carbon nanostructures with great precision and desired properties. For example, it is possible to create a single carbon nanofiber (CNF) of a specific length, diameter and slope at a specific location.
Granted patents relating to the innovation
| Patent Office | Patent |
|---|---|
| China | CN101313092 |
| Europe | EP1945840 |
| Japan | JP5519936 |
| South Korea | KR101365341 |
| South Korea | KR101386268 |
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