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The Nanostructure E-beam writer family is covering a method for the manufacture of an integrated circuit comprising nanostructures.
S Kabir • April 25, 2006
The invenÂtion: A nanosÂtrucÂture-based elecÂtron beam writer. The innoÂvaÂtion is an elecÂtron beam writer that enables the creÂation of carÂbon nanosÂtrucÂtures with great preÂciÂsion and desired propÂerÂties. For examÂple, it is posÂsiÂble to creÂate a sinÂgle carÂbon nanofiber (CNF) of a speÂcifÂic length, diamÂeÂter and slope at a speÂcifÂic location.
Patent Office | Patent |
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ChiÂna | CN101313092 |
Europe | EP1945840 |
Japan | JP5519936 |
South Korea | KR101365341 |
South Korea | KR101386268 |
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