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Ep2587514b1.pdf

Nanostructure E‑beam writer

The Nanostructure E-beam writer family is covering a method for the manufacture of an integrated circuit comprising nanostructures.

S Kabir • April 25, 2006

The inven­tion: A nanos­truc­ture-based elec­tron beam writer. The inno­va­tion is an elec­tron beam writer that enables the cre­ation of car­bon nanos­truc­tures with great pre­ci­sion and desired prop­er­ties. For exam­ple, it is pos­si­ble to cre­ate a sin­gle car­bon nanofiber (CNF) of a spe­cif­ic length, diam­e­ter and slope at a spe­cif­ic location.

Down­load the patent grant­ed by EPO.

Granted patents relating to the innovation

Patent OfficePatent
Chi­naCN101313092
EuropeEP1945840
JapanJP5519936
South KoreaKR101365341
South KoreaKR101386268
For more infor­ma­tion about a par­tic­u­lar patent, click on its name to view it on Google Patents.

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