In this paper, we present the current state-of-the-art technology of solid-state capacitors based on carbon nanofibers (CNFs). Taking advantage of the large 3D surface featured by vertically aligned and tightly spaced carbon nanofibers directly grown on the capacitor’s electrode, capacitance densities in excess of 650 nF/mm2 have been achieved at a profile height of only 7 μm, when employing medium‑k field dielectric materials such as HfO2 and Al2O3 , to form the MIM-like capacitors. The integrated capacitors were fabricated on high-resistive Si substrate, while employing fully CMOS compatible processes. For the devices with highest capacitance density, the leakage currents are typically below 0.01 nA/nF at 1V, while sustaining voltages up to 6 V as well as very good temperature and voltage stability. For the largest devices, the equivalent series resistance (ESR) and inductance (ESL) are as low as 60 mΩ and 6 pH, respectively, as well as very good temperature and voltage stability. The results of the extensive DC and RF characterizations strongly support the potential for CNF-based solid-state capacitors to compete with established high capacitance density technologies and are suitable both in integrated on-chip solutions as well as in discrete electronic applications at a minimal component volume.
Smoltek holds unique world patents for technologies that make material engineering on an atomic level possible. Smoltek has solutions that allow continued miniaturization and increased performance of semiconductors, contribute to carbon-free steel production and renewable energy storage, and enable mind control of robotic prostheses. This is a story of how Smoltek came to be.
This is the third and last article in a series of three in which Smoltek founder and strategic advisor Shafiq Kabir share his personal thoughts on nanotechnology opportunities. In the previous two articles, he has addressed both the hype and the reality of carbon nanotechnology. In this last article, he looks into the future. He discusses how carbon nanotechnology will unleash the power of the internet of everything.