Interconnects A (SmolGROW™)

A method of form­ing of nanos­truc­tures and nanos­truc­ture devices — A tru­ly unique nanos­truc­ture growth plat­form tech­nol­o­gy that enables man­u­fac­tur­ing of nano­ma­te­r­i­al devices on CMOS plat­form. The method cov­ers dif­fer­ent types of nanos­truc­tures includ­ing car­bon nan­otubes, nanofibers, nanowires, etc.

The present inven­tion pro­vides a method for nanos­truc­tures grown on a met­al under­lay­er, and a method of mak­ing the same. The grown nanos­truc­tures based on the claimed method are suit­able for man­u­fac­tur­ing elec­tron­ic devices such as an elec­tron beam writer, and a field emis­sion display.

Granted patents relating to the innovation