Atom­ic Lay­er Depo­si­tion (ALD) is a key pro­cess­ing step in con­vert­ing the excep­tion­al sur­face to vol­ume ratio offered by car­bon nanofibers to a high capac­i­tance den­si­ty CNF-MIM capacitor.

Skytech pro­duces some of the best-in-class ALD tools that offer extreme uni­for­mi­ty and film qual­i­ty over 3D struc­tures. These qual­i­ties are vital for Smoltek’s CNF-MIM tech­nol­o­gy where high aspect ratio nanofibers must be con­for­mal­ly coat­ed with a thin dielec­tric film.

Farzan Gha­vani­ni, CTO at Smoltek

Dur­ing the busi­ness trip to Tai­wan, Dr. Farzan Gha­vani­ni sat with Skytech CEO, George Yi, to dis­cuss future col­lab­o­ra­tions and how to inte­grate Skytech’s ALD clus­ter tools in CNF-MIM capac­i­tor fab­ri­ca­tion process flow.

About Skytech
Skytech is a Tai­wanese com­pa­ny, based in Hsinchu, that pro­duces state-of-the-art ALD tools, offer­ing excep­tion­al film uni­for­mi­ty, thick­ness con­trol, and mate­r­i­al properties.

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Peo­ple pic­tured in the top pho­to: Farzan Gha­vani­ni from Smoltek togeth­er with George Li and co-work­er from Skytech.