Atomic Layer Deposition (ALD) is a key processing step in converting the exceptional surface to volume ratio offered by carbon nanofibers to a high capacitance density CNF-MIM capacitor.

Skytech produces some of the best-in-class ALD tools that offer extreme uniformity and film quality over 3D structures. These qualities are vital for Smoltek’s CNF-MIM technology where high aspect ratio nanofibers must be conformally coated with a thin dielectric film.

Farzan Ghavanini, CTO at Smoltek

During the business trip to Taiwan, Dr. Farzan Ghavanini sat with Skytech CEO, George Yi, to discuss future collaborations and how to integrate Skytech’s ALD cluster tools in CNF-MIM capacitor fabrication process flow.

About Skytech
Skytech is a Taiwanese company, based in Hsinchu, that produces state-of-the-art ALD tools, offering exceptional film uniformity, thickness control, and material properties.

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People pictured in the top photo: Farzan Ghavanini from Smoltek together with George Li and co-worker from Skytech.