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We are happy to announce that our paper "Integrated on-chip solid state capacitor based on vertically aligned carbon nanofibers, grown using a CMOS temperature compatible process" is published in the academic journal Solid-State Electronics.
The paper written by the Smoltek tech team describes extreme low profile 3D on-chip integrated solid-state capacitors based on VACNFs. The areal capacitance density value of 11–15 nF/mm2 was achieved exploiting CMOS compatible microfabrication processes. Such extreme low profile with high value capacitance makes the technology a contender to be directly integrated on the active CMOS chip, or in multi-chip package and passives on silicon or glass interposer boosting 2.5D and 3D packaging performances.
Read and download the paper here.
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