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Research paper published in the proceedings of 2020 IEEE 70th Electronic Components and Technology Conference (ECTC), 2020, pp. 1614-1619.
Vertically aligned carbon nanofibers (CNFs) have been used to enhance the electrodes of the classical metal-insulator-metal (MIM) capacitor concept to form fully solid-state CNF-MIM capacitors with a large 3D surface area. The manufactured devices are characterized with regards to the capacitance density, the equivalent series resistance (ESR) and inductance (ESL), and leakage current. The process flow allows for the devices to be either integrated or discrete components, and the low height profile of about 7 μm makes the devices readily available for integration on a chip, in 3D stacking, or onto an interposer. A test vehicle is designed and used to demonstrate the simultaneous values of 420 nF/mm2 (per footprint area) capacitance density, an ESR of 35 mΩ, and an ESL of 3.4 pH. Furthermore, the leakage current is found to be below 0.01 nA/nF.
With our carbon nanofibers (CNFs) fabrication technology, we develop advanced packing solutions and ultra-miniaturized capacitors for use in the semiconductor industry.
Carbon nanofibers is a supermaterial. It is stronger, more elastic, and lighter than steel. It conducts heat and electricity better than metals. And it can be used to thousandfold the surface of materials. Let’s take a closer look at these tiny fellows.
Smoltek has developed the world’s thinnest discrete capacitor. You have to stack ten of them on top of each other to reach the same height as today’s industry-standard when it comes to surface-mounted capacitors. The most amazing thing about this microscopic capacitor is its performance. One square millimeter has a capacitance of a whopping 650 nanofarads (650 nF/mm2). Read on for more details.
Smoltek holds unique world patents for technologies that make material engineering on an atomic level possible. Smoltek has solutions that allow continued miniaturization and increased performance of semiconductors, contribute to carbon-free steel production and renewable energy storage, and enable mind control of robotic prostheses. This is a story of how Smoltek came to be.
A main goal for Smoltek Semi is to develop an industrial process for mass production of discrete CNF-MIM capacitors at contract manufacturers (foundry), including a specially designed machine for large-scale production of carbon nanofibers.
PhD thesis, Chalmers Univeristy of Technology, 2017.