Published paper in Solid-State Electronics

We are hap­py to announce that our paper “Inte­grat­ed on-chip sol­id state capac­i­tor based on ver­ti­cal­ly aligned car­bon nanofibers, grown using a CMOS tem­per­a­ture com­pat­i­ble process” is pub­lished in the aca­d­e­m­ic jour­nal Sol­id-State Electronics.

The paper writ­ten by the Smoltek tech team describes extreme low pro­file 3D on-chip inte­grat­ed sol­id-state capac­i­tors based on VAC­N­Fs. The are­al capac­i­tance den­si­ty val­ue of 11–15 nF/​mm2 was achieved exploit­ing CMOS com­pat­i­ble micro­fab­ri­ca­tion process­es. Such extreme low pro­file with high val­ue capac­i­tance makes the tech­nol­o­gy a con­tender to be direct­ly inte­grat­ed on the active CMOS chip, or in mul­ti-chip pack­age and pas­sives on sil­i­con or glass inter­pos­er boost­ing 2.5D and 3D pack­ag­ing performances.

Read and down­load the paper here.

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