The Nano Imprint Lithography family is covering a method of making high aspect ratio template, stamp, and imprinting at nanoscale using nanostructures.
The Helplayer family is covering a method to protect the underlaying substrate or materials from being damaged during the nanostructure growth process.
The Interconnects A family is covering a method regarding controlled growth of a nanostructure on a substrate, and electron emission devices based on the same.